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Spectral characteristics of a dense gas-metal reflection discharge plasma

Elemental composition of the plasma, which mostly includes working substances introduced into the discharge through puffing of hydrogen and sputtering of titanium, is determined by the spectrometric method. The analysis of the spectrum of microwave signal fluctuations shows that the characteristic s...

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Bibliographic Details
Published in:Technical physics 2010-05, Vol.55 (5), p.735-737
Main Authors: Kovtun, Yu. V., Larin, Yu. V., Skibenko, A. I., Skibenko, E. I., Shapoval, A. N., Yuferov, V. B.
Format: Article
Language:English
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Summary:Elemental composition of the plasma, which mostly includes working substances introduced into the discharge through puffing of hydrogen and sputtering of titanium, is determined by the spectrometric method. The analysis of the spectrum of microwave signal fluctuations shows that the characteristic spectrum peaks correspond to ion cyclotron frequencies of the gases and metal vapors forming the atmosphere of the discharge. The characteristic peaks of the optical and microwave discharge fluctuation spectra are found to coincide.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784210050233