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Characterization of porous silicon carbide according to absorption and photoluminescence spectra
The results of the atomic-force microscopy, optical-absorption spectroscopy, and photoluminescence spectroscopy of porous silicon carbide ( por -SiC) produced by anodic etching are reported. Analysis of the data shows that the cubic SiC phase is lacking in the porous layer and the photoluminescence...
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Published in: | Semiconductors (Woodbury, N.Y.) N.Y.), 2014-08, Vol.48 (8), p.1028-1030 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The results of the atomic-force microscopy, optical-absorption spectroscopy, and photoluminescence spectroscopy of porous silicon carbide (
por
-SiC) produced by anodic etching are reported. Analysis of the data shows that the cubic SiC phase is lacking in the porous layer and the photoluminescence signal from
por
-SiC at the excitation photon energy
h
ν
ex
≤
E
g
appears due to the formation of radiative centers associated with impurity atoms and surface defects produced upon anodic etching of the sample and subsequent treatment to uncover the pores. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782614080041 |