Characterization of non-stoichiometric co-sputtered Ba.sub.0.6Sr.sub.0.4.sub.1 + xO.sub.3 - δ thin films for tunable passive microwave applications

The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distribution in the thin films obtained by X-ray photoelectron spectroscopy, Rutherford backscatterin...

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Bibliographic Details
Published in:Analytical and bioanalytical chemistry 2012-05, Vol.403 (3), p.643
Main Authors: Stemme, F, Geßwein, H, Drahus, M. D, Hollander, B, Azucena, C, Binder, J. R, Eichel, R.-A, Haußelt, J, Bruns, M
Format: Article
Language:English
Subjects:
Atomic force microscopy
Chemical properties
Crystals
Dielectric films
Diffraction
Mass spectrometry
Structure
Thin films
X-ray spectroscopy
X-rays
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Summary:The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distribution in the thin films obtained by X-ray photoelectron spectroscopy, Rutherford backscattering spectrometry, and time-of-flight secondary ion mass spectroscopy reveal a homogeneous dopant concentration throughout the thin film. The incorporation of the iron dopant and the temperature-dependent evolution of the crystal structure and morphology are analyzed by electron paramagnetic resonance spectroscopy, X-ray diffraction, Raman spectroscopy, atomic force microscopy, and scanning electron microscopy. In summary, these results emphasize the RF magnetron co-sputter process as a versatile way to fabricate doped thin films.
ISSN:1618-2642
DOI:10.1007/s00216-011-5435-z