Melting of a thin aluminum film on a dielectric substrate under a high-power ion beam

The effect of a high-power ion beam on thin aluminum films (0.3 and 1.9 μm thick) deposited onto dielectric substrates made of sodium-silicate glass and pyroceramics is studied. The main stages of changes in the surface morphology of a film, namely, its melting and transformation into an array of in...

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Bibliographic Details
Published in:Technical physics 2015-06, Vol.60 (6), p.885-890
Main Authors: Kovivchak, V. S., Panova, T. V., Burlakov, R. B.
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
Dielectric films
Dielectrics
Physical Science of Materials
Physics
Physics and Astronomy
Thin films
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Summary:The effect of a high-power ion beam on thin aluminum films (0.3 and 1.9 μm thick) deposited onto dielectric substrates made of sodium-silicate glass and pyroceramics is studied. The main stages of changes in the surface morphology of a film, namely, its melting and transformation into an array of individual metal particles, are determined. Possible mechanisms of the detected phenomena are considered.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784215060134