Loading…
Influence of the Anode of a Non-Self-Sustained Glow Discharge with a Hollow Cathode on the Spatial Distribution of Plasma Concentration
The results of investigation of the influence of geometrical dimensions, shape and position of the anode of a high-current non-self-sustained glow discharge with a hollow cathode at low (≈1 Pa) pressure with the current up to 100 A on the degree of inhomogeneity of azimuthal plasma-concentration dis...
Saved in:
Published in: | Russian physics journal 2019-11, Vol.62 (7), p.1147-1153 |
---|---|
Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | The results of investigation of the influence of geometrical dimensions, shape and position of the anode of a high-current non-self-sustained glow discharge with a hollow cathode at low (≈1 Pa) pressure with the current up to 100 A on the degree of inhomogeneity of azimuthal plasma-concentration distributions are presented. The azimuthal measurements demonstrate that upon injection of an electron flow with the current exceeding that of the electrons, formed as a result of the secondary ion-electron emission, the value of the average path length L of electrons before their escape to the anode is much lower than that in a self-sustained discharge burning mode. It is determined that in the case of injection of an electron flow into the hollow-cathode glow discharge the anode position considerably affects the degree of plasma concentration inhomogeneity. It is shown that placing the annular anode in the site preventing the line-of-site between the electron injection and anode surface directions allows achieving the minimum inhomogeneity coefficient value. |
---|---|
ISSN: | 1064-8887 1573-9228 |
DOI: | 10.1007/s11182-019-01829-2 |