Considerations for primary vacuum pumping in mass spectrometry systems: mass spectrometry systems have specific vacuum requirements. New developments in oil-free, or dry, primary vacuum pumps have been introduced recently and are discussed in this article with respect to capacity, throughput, and specific pumping requirements for process gases

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Bibliographic Details
Published in:Spectroscopy (Springfield, Or.) Or.), 2005-01, Vol.20 (1), p.44
Main Authors: Chew, A.D, Cameron, A, Goodwin, D, Hamilton, J, Hawley-Jones, T, Meares, P, Pumfrey, J, Ramsden, J, Steele, D
Format: Magazinearticle
Language:English
Online Access:Get full text
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ISSN:0887-6703
1939-1900