Unpatterned surface inspection for next-generation devices

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Bibliographic Details
Published in:Solid state technology 1996-08, Vol.39 (8), p.93-99
Main Authors: ALTENDORFER, H, KREN, G, LARSON, C. T, STOKOWSKI, S. E
Format: Magazinearticle
Language:English
Subjects:
Applied sciences
Electronics
Equipment and supplies
Exact sciences and technology
Inspection
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductor industry
Semiconductor wafers
Online Access:Get full text
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ISSN:0038-111X