Scanning capacitance microscopy for carrier profiling in semiconductors

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Bibliographic Details
Published in:Solid state technology 1997-06, Vol.40 (6), p.125-133
Main Authors: ERICKSON, A. N, ADDERTON, D. M, STRAUSSER, Y. E, TENCH, R. J
Format: Magazinearticle
Language:English
Subjects:
Exact sciences and technology
Industrial microscopy
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Scanning devices
Scanning microscopy
Scanning probe microscopes, components and techniques
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ISSN:0038-111X