Avoiding the pitfalls of surface analysis

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Bibliographic Details
Published in:Solid state technology 1997-10, Vol.40 (10), p.169-178
Main Authors: BECK, S. E, GILICINSKI, A. G
Format: Magazinearticle
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Methods
Production engineering
Production management
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductor industry
Semiconductor wafers
Online Access:Get full text
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ISSN:0038-111X