Effect of the carrier gas composition on the electrical and luminescent properties of CVD-grown zinc oxide films

The electrical and luminescent properties of zinc oxide films grown by CVD on sapphire substrates with different carrier gases are investigated. It is found that hydrogen, oxygen, and ammonia used as a carrier gas in the growth process insignificantly influence the defect structure and impurity cont...

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Bibliographic Details
Published in:Technical physics 2014-05, Vol.59 (5), p.708-710
Main Authors: Bagamadova, A. M., Zobov, E. M., Omaev, A. K.
Format: Article
Language:English
Subjects:
Ammonia
Analysis
Chemical vapor deposition
Classical and Continuum Physics
Hydrogen
Optical properties
Physics
Physics and Astronomy
Physics of Nanostructures
Zinc oxide
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Summary:The electrical and luminescent properties of zinc oxide films grown by CVD on sapphire substrates with different carrier gases are investigated. It is found that hydrogen, oxygen, and ammonia used as a carrier gas in the growth process insignificantly influence the defect structure and impurity content in the crystal. Only hydrogen decreases the density of radiative recombination centers responsible for the green luminescence band typical of zinc oxide.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784214050041