Salicides and alternative technologies for future ICs

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Bibliographic Details
Published in:Solid state technology 1999-08, Vol.42 (8), p.55
Main Authors: Kittl, Jorge A, Shiau, Wei-Tsun, Miles, Donald, Violette, Katherine E, Hu, Jerry C, Hong, Qi-Zhong
Format: Magazinearticle
Language:English
Subjects:
Copper compounds
Integrated circuits
Semiconductor chips
Semiconductor industry
Silicides
Titanium compounds
Online Access:Get full text
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ISSN:0038-111X