Salicides and alternative technologies for future ICs

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Published in:Solid state technology 1999-08, Vol.42 (8), p.55
Main Authors: Kittl, Jorge A, Shiau, Wei-Tsun, Miles, Donald, Violette, Katherine E, Hu, Jerry C, Hong, Qi-Zhong
Format: Magazinearticle
Language:English
Subjects:
Copper compounds
Integrated circuits
Semiconductor chips
Semiconductor industry
Silicides
Titanium compounds
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container_end_page
container_issue 8
container_start_page 55
container_title Solid state technology
container_volume 42
creator Kittl, Jorge A
Shiau, Wei-Tsun
Miles, Donald
Violette, Katherine E
Hu, Jerry C
Hong, Qi-Zhong
description
format magazinearticle
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identifier ISSN: 0038-111X
ispartof Solid state technology, 1999-08, Vol.42 (8), p.55
issn 0038-111X
language eng
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source BSC - Ebsco (Business Source Ultimate)
subjects Copper compounds
Integrated circuits
Semiconductor chips
Semiconductor industry
Silicides
Titanium compounds
title Salicides and alternative technologies for future ICs
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