Pattern transfer into low dielectric constant materials by high-density plasma etching

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Bibliographic Details
Published in:Solid state technology 2000-05, Vol.43 (5), p.125
Main Authors: Oehrlein, Gottlieb S, Standaert, Theodorus E.F.M, Matsuo, Peter J
Format: Magazinearticle
Language:English
Subjects:
Electronic components industry
Materials
Online Access:Get full text
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ISSN:0038-111X