Pattern transfer into low dielectric constant materials by high-density plasma etching

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Published in:Solid state technology 2000-05, Vol.43 (5), p.125
Main Authors: Oehrlein, Gottlieb S, Standaert, Theodorus E.F.M, Matsuo, Peter J
Format: Magazinearticle
Language:English
Subjects:
Electronic components industry
Materials
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container_issue 5
container_start_page 125
container_title Solid state technology
container_volume 43
creator Oehrlein, Gottlieb S
Standaert, Theodorus E.F.M
Matsuo, Peter J
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format magazinearticle
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subjects Electronic components industry
Materials
title Pattern transfer into low dielectric constant materials by high-density plasma etching
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