DESIGN AND ULTRASONIC CHARACTERIZATION OF A THIN-FILM, FLEXIBLE, PMUT ARRAY: A materials and design optimization study uses finite element analyses to improve designs for robust and practical piezoelectric micromachined ultrasonic transducer (PMUT) sensor arrays

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Bibliographic Details
Published in:Advanced materials & processes 2020-11, Vol.178 (8), p.15
Main Authors: Kim, Jeong Nyeon, Liu, Tianning, Jackson, Thomas N, Choi, Kyusun, Trolier-McKinstry, Susan, Tutwiler, Richard L, Todd, Judith A
Format: Magazinearticle
Language:English
Subjects:
Acoustic emission testing
Design and construction
Finite element method
Materials
Piezoelectric transducers
Sensors
Technology application
Online Access:Get full text
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ISSN:0882-7958