Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Scheduling in semiconductor manufacturing is of vital importance due to the impact on production performance indicators such as equipment utilization, cycle time, and delivery times. With the increasing complexity of semiconductor manufacturing, ever-new products and demanding customers, scheduling...

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Bibliographic Details
Published in:Journal of scheduling 2015-04, Vol.18 (2), p.195-205
Main Authors: Yugma, Claude, Blue, Jakey, Dauzère-Pérès, Stéphane, Obeid, Ali
Format: Article
Language:English
Subjects:
Advanced manufacturing technologies
Algorithms
Artificial Intelligence
Binding
Business and Management
Calculus of Variations and Optimal Control
Optimization
Computer Science
Control equipment
Control systems
Customers
Cycle time
Delivery scheduling
Manufacturing
Operations Research
Operations Research/Decision Theory
Optimization
Process control
Process controls
Production control
Production scheduling
Productivity
Scheduling
Semiconductors
Statistical process control
Studies
Supply Chain Management
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Summary:Scheduling in semiconductor manufacturing is of vital importance due to the impact on production performance indicators such as equipment utilization, cycle time, and delivery times. With the increasing complexity of semiconductor manufacturing, ever-new products and demanding customers, scheduling plans for efficient production control become crucial. Scheduling and control are mutually dependent as control requires information from scheduling, for example, where jobs are processed, and scheduling requires control information, for example, on which equipment operations can be processed. Based on a survey of the literature, this article proposes a review and an outlook for the potential improvements by binding scheduling decisions and information coming from advanced process control systems in semiconductor manufacturing.
ISSN:1094-6136
1099-1425
DOI:10.1007/s10951-014-0381-1