Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Scheduling in semiconductor manufacturing is of vital importance due to the impact on production performance indicators such as equipment utilization, cycle time, and delivery times. With the increasing complexity of semiconductor manufacturing, ever-new products and demanding customers, scheduling...

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Published in:Journal of scheduling 2015-04, Vol.18 (2), p.195-205
Main Authors: Yugma, Claude, Blue, Jakey, Dauzère-Pérès, Stéphane, Obeid, Ali
Format: Article
Language:English
Subjects:
Advanced manufacturing technologies
Algorithms
Artificial Intelligence
Binding
Business and Management
Calculus of Variations and Optimal Control
Optimization
Computer Science
Control equipment
Control systems
Customers
Cycle time
Delivery scheduling
Manufacturing
Operations Research
Operations Research/Decision Theory
Optimization
Process control
Process controls
Production control
Production scheduling
Productivity
Scheduling
Semiconductors
Statistical process control
Studies
Supply Chain Management
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cited_by cdi_FETCH-LOGICAL-c448t-48bb2e7816cd6b5f85cacc65e8b7d380bf74760f98ec754c0cd2acae70cbbe13
cites cdi_FETCH-LOGICAL-c448t-48bb2e7816cd6b5f85cacc65e8b7d380bf74760f98ec754c0cd2acae70cbbe13
container_end_page 205
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container_start_page 195
container_title Journal of scheduling
container_volume 18
creator Yugma, Claude
Blue, Jakey
Dauzère-Pérès, Stéphane
Obeid, Ali
description Scheduling in semiconductor manufacturing is of vital importance due to the impact on production performance indicators such as equipment utilization, cycle time, and delivery times. With the increasing complexity of semiconductor manufacturing, ever-new products and demanding customers, scheduling plans for efficient production control become crucial. Scheduling and control are mutually dependent as control requires information from scheduling, for example, where jobs are processed, and scheduling requires control information, for example, on which equipment operations can be processed. Based on a survey of the literature, this article proposes a review and an outlook for the potential improvements by binding scheduling decisions and information coming from advanced process control systems in semiconductor manufacturing.
doi_str_mv 10.1007/s10951-014-0381-1
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fullrecord <record><control><sourceid>proquest_hal_p</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_emse_01555604v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1677918763</sourcerecordid><originalsourceid>FETCH-LOGICAL-c448t-48bb2e7816cd6b5f85cacc65e8b7d380bf74760f98ec754c0cd2acae70cbbe13</originalsourceid><addsrcrecordid>eNp1kUtr3TAQhU1poGnSH9CdoJtScKqx9brdhdAmgQvdZC_k8ThRaku3kn1L_33lOIRS6EYvvnM4o1NV74FfAOf6cwa-k1BzEDVvDdTwqjotT7saRCNfP51FraBVb6q3OT9yzo1u4LTyt2Gm--RmHwOLA8v4QP0y-nDPXOiZ648uIPXskCJSzgxjmFMcmQ8s0-TLtV9wjolNLiyDw3lJRfuFJTp6-vXkEZd5jPHHeXUyuDHTu-f9rLr79vXu6qbef7--vbrc1yiEmWthuq4hbUBhrzo5GIkOUUkyne5bw7tBC634sDOEWgrk2DcOHWmOXUfQnlWfNtsHN9pD8pNLv2103t5c7i1NmSwHKaXi4rjCHze4jPdzoTzbyWekcXSB4pItKK13YLRqC_rhH_QxLimUSQoltYSy8kLBRmGKOScaXiIAt2tRdiuqhBB2LcquIZpNkw_r31H6y_m_oj8aN5dT</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1657511650</pqid></control><display><type>article</type><title>Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook</title><source>ABI/INFORM Global</source><source>Springer Nature</source><creator>Yugma, Claude ; Blue, Jakey ; Dauzère-Pérès, Stéphane ; Obeid, Ali</creator><creatorcontrib>Yugma, Claude ; Blue, Jakey ; Dauzère-Pérès, Stéphane ; Obeid, Ali</creatorcontrib><description>Scheduling in semiconductor manufacturing is of vital importance due to the impact on production performance indicators such as equipment utilization, cycle time, and delivery times. With the increasing complexity of semiconductor manufacturing, ever-new products and demanding customers, scheduling plans for efficient production control become crucial. Scheduling and control are mutually dependent as control requires information from scheduling, for example, where jobs are processed, and scheduling requires control information, for example, on which equipment operations can be processed. Based on a survey of the literature, this article proposes a review and an outlook for the potential improvements by binding scheduling decisions and information coming from advanced process control systems in semiconductor manufacturing.</description><identifier>ISSN: 1094-6136</identifier><identifier>EISSN: 1099-1425</identifier><identifier>DOI: 10.1007/s10951-014-0381-1</identifier><language>eng</language><publisher>Boston: Springer US</publisher><subject>Advanced manufacturing technologies ; Algorithms ; Artificial Intelligence ; Binding ; Business and Management ; Calculus of Variations and Optimal Control; Optimization ; Computer Science ; Control equipment ; Control systems ; Customers ; Cycle time ; Delivery scheduling ; Manufacturing ; Operations Research ; Operations Research/Decision Theory ; Optimization ; Process control ; Process controls ; Production control ; Production scheduling ; Productivity ; Scheduling ; Semiconductors ; Statistical process control ; Studies ; Supply Chain Management</subject><ispartof>Journal of scheduling, 2015-04, Vol.18 (2), p.195-205</ispartof><rights>Springer Science+Business Media New York 2014</rights><rights>Springer Science+Business Media New York 2015</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c448t-48bb2e7816cd6b5f85cacc65e8b7d380bf74760f98ec754c0cd2acae70cbbe13</citedby><cites>FETCH-LOGICAL-c448t-48bb2e7816cd6b5f85cacc65e8b7d380bf74760f98ec754c0cd2acae70cbbe13</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://www.proquest.com/docview/1657511650/fulltextPDF?pq-origsite=primo$$EPDF$$P50$$Gproquest$$H</linktopdf><linktohtml>$$Uhttps://www.proquest.com/docview/1657511650?pq-origsite=primo$$EHTML$$P50$$Gproquest$$H</linktohtml><link.rule.ids>230,314,777,781,882,11669,27905,27906,36041,36042,44344,74644</link.rule.ids><backlink>$$Uhttps://hal-emse.ccsd.cnrs.fr/emse-01555604$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Yugma, Claude</creatorcontrib><creatorcontrib>Blue, Jakey</creatorcontrib><creatorcontrib>Dauzère-Pérès, Stéphane</creatorcontrib><creatorcontrib>Obeid, Ali</creatorcontrib><title>Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook</title><title>Journal of scheduling</title><addtitle>J Sched</addtitle><description>Scheduling in semiconductor manufacturing is of vital importance due to the impact on production performance indicators such as equipment utilization, cycle time, and delivery times. With the increasing complexity of semiconductor manufacturing, ever-new products and demanding customers, scheduling plans for efficient production control become crucial. Scheduling and control are mutually dependent as control requires information from scheduling, for example, where jobs are processed, and scheduling requires control information, for example, on which equipment operations can be processed. Based on a survey of the literature, this article proposes a review and an outlook for the potential improvements by binding scheduling decisions and information coming from advanced process control systems in semiconductor manufacturing.</description><subject>Advanced manufacturing technologies</subject><subject>Algorithms</subject><subject>Artificial Intelligence</subject><subject>Binding</subject><subject>Business and Management</subject><subject>Calculus of Variations and Optimal Control; Optimization</subject><subject>Computer Science</subject><subject>Control equipment</subject><subject>Control systems</subject><subject>Customers</subject><subject>Cycle time</subject><subject>Delivery scheduling</subject><subject>Manufacturing</subject><subject>Operations Research</subject><subject>Operations Research/Decision Theory</subject><subject>Optimization</subject><subject>Process control</subject><subject>Process controls</subject><subject>Production control</subject><subject>Production scheduling</subject><subject>Productivity</subject><subject>Scheduling</subject><subject>Semiconductors</subject><subject>Statistical process control</subject><subject>Studies</subject><subject>Supply Chain Management</subject><issn>1094-6136</issn><issn>1099-1425</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><sourceid>M0C</sourceid><recordid>eNp1kUtr3TAQhU1poGnSH9CdoJtScKqx9brdhdAmgQvdZC_k8ThRaku3kn1L_33lOIRS6EYvvnM4o1NV74FfAOf6cwa-k1BzEDVvDdTwqjotT7saRCNfP51FraBVb6q3OT9yzo1u4LTyt2Gm--RmHwOLA8v4QP0y-nDPXOiZ648uIPXskCJSzgxjmFMcmQ8s0-TLtV9wjolNLiyDw3lJRfuFJTp6-vXkEZd5jPHHeXUyuDHTu-f9rLr79vXu6qbef7--vbrc1yiEmWthuq4hbUBhrzo5GIkOUUkyne5bw7tBC634sDOEWgrk2DcOHWmOXUfQnlWfNtsHN9pD8pNLv2103t5c7i1NmSwHKaXi4rjCHze4jPdzoTzbyWekcXSB4pItKK13YLRqC_rhH_QxLimUSQoltYSy8kLBRmGKOScaXiIAt2tRdiuqhBB2LcquIZpNkw_r31H6y_m_oj8aN5dT</recordid><startdate>20150401</startdate><enddate>20150401</enddate><creator>Yugma, Claude</creator><creator>Blue, Jakey</creator><creator>Dauzère-Pérès, Stéphane</creator><creator>Obeid, Ali</creator><general>Springer US</general><general>Springer Nature B.V</general><general>Springer Verlag</general><scope>AAYXX</scope><scope>CITATION</scope><scope>0U~</scope><scope>1-H</scope><scope>3V.</scope><scope>7TA</scope><scope>7TB</scope><scope>7WY</scope><scope>7WZ</scope><scope>7X7</scope><scope>7XB</scope><scope>87Z</scope><scope>88C</scope><scope>8AL</scope><scope>8AO</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>8FI</scope><scope>8FJ</scope><scope>8FK</scope><scope>8FL</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BEZIV</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>FR3</scope><scope>FRNLG</scope><scope>FYUFA</scope><scope>F~G</scope><scope>GHDGH</scope><scope>GNUQQ</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>JQ2</scope><scope>K60</scope><scope>K6~</scope><scope>K7-</scope><scope>K9.</scope><scope>L.-</scope><scope>L.0</scope><scope>M0C</scope><scope>M0N</scope><scope>M0S</scope><scope>M0T</scope><scope>P5Z</scope><scope>P62</scope><scope>PQBIZ</scope><scope>PQBZA</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PYYUZ</scope><scope>Q9U</scope><scope>7U5</scope><scope>L7M</scope><scope>1XC</scope></search><sort><creationdate>20150401</creationdate><title>Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook</title><author>Yugma, Claude ; Blue, Jakey ; Dauzère-Pérès, Stéphane ; Obeid, Ali</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c448t-48bb2e7816cd6b5f85cacc65e8b7d380bf74760f98ec754c0cd2acae70cbbe13</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>Advanced manufacturing technologies</topic><topic>Algorithms</topic><topic>Artificial Intelligence</topic><topic>Binding</topic><topic>Business and Management</topic><topic>Calculus of Variations and Optimal Control; Optimization</topic><topic>Computer Science</topic><topic>Control equipment</topic><topic>Control systems</topic><topic>Customers</topic><topic>Cycle time</topic><topic>Delivery scheduling</topic><topic>Manufacturing</topic><topic>Operations Research</topic><topic>Operations Research/Decision Theory</topic><topic>Optimization</topic><topic>Process control</topic><topic>Process controls</topic><topic>Production control</topic><topic>Production scheduling</topic><topic>Productivity</topic><topic>Scheduling</topic><topic>Semiconductors</topic><topic>Statistical process control</topic><topic>Studies</topic><topic>Supply Chain Management</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yugma, Claude</creatorcontrib><creatorcontrib>Blue, Jakey</creatorcontrib><creatorcontrib>Dauzère-Pérès, Stéphane</creatorcontrib><creatorcontrib>Obeid, Ali</creatorcontrib><collection>CrossRef</collection><collection>Global News &amp; ABI/Inform Professional</collection><collection>Trade PRO</collection><collection>ProQuest Central (Corporate)</collection><collection>Materials Business File</collection><collection>Mechanical &amp; Transportation Engineering Abstracts</collection><collection>ABI/INFORM Collection</collection><collection>ABI/INFORM Global (PDF only)</collection><collection>Health &amp; Medical Collection</collection><collection>ProQuest Central (purchase pre-March 2016)</collection><collection>ABI/INFORM Global (Alumni Edition)</collection><collection>Healthcare Administration Database (Alumni)</collection><collection>Computing Database (Alumni Edition)</collection><collection>ProQuest Pharma Collection</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Hospital Premium Collection</collection><collection>Hospital Premium Collection (Alumni Edition)</collection><collection>ProQuest Central (Alumni) (purchase pre-March 2016)</collection><collection>ABI/INFORM Collection (Alumni Edition)</collection><collection>ProQuest Central (Alumni)</collection><collection>ProQuest Central</collection><collection>Advanced Technologies &amp; Aerospace Collection</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Business Premium Collection</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>Engineering Research Database</collection><collection>Business Premium Collection (Alumni)</collection><collection>Health Research Premium Collection</collection><collection>ABI/INFORM Global (Corporate)</collection><collection>Health Research Premium Collection (Alumni)</collection><collection>ProQuest Central Student</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>ProQuest Computer Science Collection</collection><collection>ProQuest Business Collection (Alumni Edition)</collection><collection>ProQuest Business Collection</collection><collection>Computer Science Database</collection><collection>ProQuest Health &amp; Medical Complete (Alumni)</collection><collection>ABI/INFORM Professional Advanced</collection><collection>ABI/INFORM Professional Standard</collection><collection>ABI/INFORM Global</collection><collection>Computing Database</collection><collection>Health &amp; Medical Collection (Alumni Edition)</collection><collection>Healthcare Administration Database</collection><collection>Advanced Technologies &amp; Aerospace Database</collection><collection>ProQuest Advanced Technologies &amp; Aerospace Collection</collection><collection>One Business</collection><collection>ProQuest One Business (Alumni)</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ABI/INFORM Collection China</collection><collection>ProQuest Central Basic</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Hyper Article en Ligne (HAL)</collection><jtitle>Journal of scheduling</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yugma, Claude</au><au>Blue, Jakey</au><au>Dauzère-Pérès, Stéphane</au><au>Obeid, Ali</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook</atitle><jtitle>Journal of scheduling</jtitle><stitle>J Sched</stitle><date>2015-04-01</date><risdate>2015</risdate><volume>18</volume><issue>2</issue><spage>195</spage><epage>205</epage><pages>195-205</pages><issn>1094-6136</issn><eissn>1099-1425</eissn><abstract>Scheduling in semiconductor manufacturing is of vital importance due to the impact on production performance indicators such as equipment utilization, cycle time, and delivery times. With the increasing complexity of semiconductor manufacturing, ever-new products and demanding customers, scheduling plans for efficient production control become crucial. Scheduling and control are mutually dependent as control requires information from scheduling, for example, where jobs are processed, and scheduling requires control information, for example, on which equipment operations can be processed. Based on a survey of the literature, this article proposes a review and an outlook for the potential improvements by binding scheduling decisions and information coming from advanced process control systems in semiconductor manufacturing.</abstract><cop>Boston</cop><pub>Springer US</pub><doi>10.1007/s10951-014-0381-1</doi><tpages>11</tpages></addata></record>
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ispartof Journal of scheduling, 2015-04, Vol.18 (2), p.195-205
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language eng
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source ABI/INFORM Global; Springer Nature
subjects Advanced manufacturing technologies
Algorithms
Artificial Intelligence
Binding
Business and Management
Calculus of Variations and Optimal Control
Optimization
Computer Science
Control equipment
Control systems
Customers
Cycle time
Delivery scheduling
Manufacturing
Operations Research
Operations Research/Decision Theory
Optimization
Process control
Process controls
Production control
Production scheduling
Productivity
Scheduling
Semiconductors
Statistical process control
Studies
Supply Chain Management
title Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-18T23%3A15%3A26IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_hal_p&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Integration%20of%20scheduling%20and%20advanced%20process%20control%20in%20semiconductor%20manufacturing:%20review%20and%20outlook&rft.jtitle=Journal%20of%20scheduling&rft.au=Yugma,%20Claude&rft.date=2015-04-01&rft.volume=18&rft.issue=2&rft.spage=195&rft.epage=205&rft.pages=195-205&rft.issn=1094-6136&rft.eissn=1099-1425&rft_id=info:doi/10.1007/s10951-014-0381-1&rft_dat=%3Cproquest_hal_p%3E1677918763%3C/proquest_hal_p%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c448t-48bb2e7816cd6b5f85cacc65e8b7d380bf74760f98ec754c0cd2acae70cbbe13%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=1657511650&rft_id=info:pmid/&rfr_iscdi=true