Three-dimensional modelling of micromachined-ultrasonic-transducer arrays operating in water

We report on the 3-D modelling of periodic arrays of capacitive micromachined ultrasonic transducers (cMUTs) operating in fluid. Specific developments have been performed to model biperiodic transducer arrays and to take into account radiation into any stratified media at the front-side as well as t...

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Bibliographic Details
Published in:Ultrasonics 2005-05, Vol.43 (6), p.457-465
Main Authors: Wilm, Mikaël, Reinhardt, Alexandre, Laude, Vincent, Armati, Raphaël, Daniau, William, Ballandras, Sylvain
Format: Article
Language:English
Subjects:
Acoustics
Array
Cross-talk
Equipment Design
Exact sciences and technology
Finite Element Analysis
Fundamental areas of phenomenology (including applications)
Humans
Mechanics
Micromachined ultrasonic transducer
Miniaturization
Periodicity
Physics
Radiation
Silicon - chemistry
Silicon Compounds - chemistry
Transducers
Ultrasonics, quantum acoustics, and physical effects of sound
Ultrasonography - instrumentation
Water
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Summary:We report on the 3-D modelling of periodic arrays of capacitive micromachined ultrasonic transducers (cMUTs) operating in fluid. Specific developments have been performed to model biperiodic transducer arrays and to take into account radiation into any stratified media at the front-side as well as the back-side of the device. The model is based on a periodic finite-element-analysis/boundary-element-method (FEA/BEM). It is applied to micromachined ultrasonic transducers (MUTs), based on silicon-nitride-circular-membrane arrays on a silicon substrate, and operating in water. The spectrum characteristics of MUTs excited in phase are investigated, showing that very-large-band emission is achievable as previously demonstrated by many authors. However, other contributions are also found, depending on the excitation conditions, that do not radiate in the fluid. These contributions are identified as guided modes that could generate significant cross-talk effects. The origin and the nature of these modes is analyzed to gain insight in the actual operation of MUTs.
ISSN:0041-624X
1874-9968
DOI:10.1016/j.ultras.2004.09.006