Angle-resolved ellipsometry of light scattering: discrimination of surface and bulk effects in substrates and optical coatings

Angle-resolved ellipsometry of light scattering is an original technique developed at the Fresnel Institute to identify scattering processes in substrates and multilayers. We extend the investigation because numerous experimental results proved that the technique can be of major interest for analysi...

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Bibliographic Details
Published in:Applied optics (2004) 2002-06, Vol.41 (16), p.3362-3369
Main Authors: Deumié, Carole, Giovannini, Hugues, Amra, Claude
Format: Article
Language:English
Subjects:
Optics
Physics
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Summary:Angle-resolved ellipsometry of light scattering is an original technique developed at the Fresnel Institute to identify scattering processes in substrates and multilayers. We extend the investigation because numerous experimental results proved that the technique can be of major interest for analysis of microcomponents and their scattering origins. Surface and bulk effects can be separated in most situations, as well as the oblique growth of materials and the presence of first-order contaminants.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.41.003362