An alternative scattering method to characterize surface roughness from transparent substrates

An alternative scattering method is developed to characterize surface roughness from the two faces of transparent substrates. Specific weights are attributed to each surface in the scattering process, due to the large substrate thickness. The resulting roughness spectra are shown to quasi-overlap th...

Full description

Saved in:
Bibliographic Details
Published in:Optics express 2007-07, Vol.15 (15), p.9222-9231
Main Authors: Zerrad, M, Deumié, C, Lequime, M, Amra, C
Format: Article
Language:English
Subjects:
Optics
Physics
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:An alternative scattering method is developed to characterize surface roughness from the two faces of transparent substrates. Specific weights are attributed to each surface in the scattering process, due to the large substrate thickness. The resulting roughness spectra are shown to quasi-overlap those of near field microscopy.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.15.009222