Lithium Ion Conducting Lithium Sulfur Oxynitride Thin Film

Thin-film solid electrolytes, lithium sulfur oxynitride (Lison), were fabricated by radio-frequency (rf) magnetron sputtering under various gas compositions. Composition of the thin film was determined by atomic absorption spectroscopy, Rutherford back-scattering spectroscopy, and energy-dispersive...

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Bibliographic Details
Published in:Electrochemical and solid-state letters 2004, Vol.7 (8), p.A256-A258
Main Authors: Joo, K.-H., Sohn, H.-J., Vinatier, P., Pecquenard, B., Levasseur, A.
Format: Article
Language:English
Subjects:
Chemical Sciences
Material chemistry
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Summary:Thin-film solid electrolytes, lithium sulfur oxynitride (Lison), were fabricated by radio-frequency (rf) magnetron sputtering under various gas compositions. Composition of the thin film was determined by atomic absorption spectroscopy, Rutherford back-scattering spectroscopy, and energy-dispersive X-ray spectrometry. The ionic conductivity of the thin film at room temperature showed a maximum of 2 x 10(-5) S/cm for Li0.29S0.28O0.35N0.09. Microstructure of Lison thin films shows an amorphous nature when deposited under nitrogen atmosphere. The electrolyte was stable up to 5.5 V vs. Li/Li+.
ISSN:1099-0062
DOI:10.1149/1.1769317