Photonic devices based on preferential etching

We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid cryst...

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Bibliographic Details
Published in:Applied optics (2004) 2005-11, Vol.44 (33), p.7181-7186
Main Authors: Bellini, Bob, Larchanché, Jean-François, Vilcot, Jean-Pierre, Decoster, Didier, Beccherelli, Romeo, d'Alessandro, Antonio
Format: Article
Language:English
Subjects:
Engineering Sciences
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Summary:We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.44.007181