Chemical Etching of {hk0} Silicon plates in EDP : Part1 : Experimental and Comparison with TMAH

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Bibliographic Details
Published in:Active and passive electronic components 2000, Vol.23
Main Authors: Tellier, C.R., Leblois, T., Charbonnieras, A.
Format: Article
Language:English
Subjects:
Engineering Sciences
Micro and nanotechnologies
Microelectronics
Online Access:Get full text
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ISSN:0882-7516