Low-Temperature low-resistivity PEALD TiN using TDMAT under hydrogen redecing ambient

Saved in:
Bibliographic Details
Published in:Journal of the Electrochemical Society 2008, Vol.155 (8), p.625-632
Main Authors: Caubet, P., Blomberg, T., Benaboud, R., Wyon, C., Blanquet, E., Gonchond, J.P., Juhel, M., Bouvet, P., Gros-Jean, M., Michaelos, J., Richard, C., Iteprat, B.
Format: Article
Language:English
Subjects:
Chemical and Process Engineering
Chemical Sciences
Engineering Sciences
Material chemistry
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0013-4651
1945-7111