Ultra-High Q/V Fabry-Perot microcavity on SOI substrate

We experimentally demonstrate an ultra high Q/V nanocavity on SOI substrate. The design is based on modal adaptation within the cavity and allows to measure a quality factor of 58.000 for a modal volume of 0.6(lambda/n)(3) . This record Q/V value of 10(5) achieved for a structure standing on a physi...

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Bibliographic Details
Published in:Optics express 2007-11, Vol.15 (24), p.16090-16096
Main Authors: Velha, P, Picard, E, Charvolin, T, Hadji, E, Rodier, J C, Lalanne, P, Peyrade, D
Format: Article
Language:English
Subjects:
Optics
Physics
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Summary:We experimentally demonstrate an ultra high Q/V nanocavity on SOI substrate. The design is based on modal adaptation within the cavity and allows to measure a quality factor of 58.000 for a modal volume of 0.6(lambda/n)(3) . This record Q/V value of 10(5) achieved for a structure standing on a physical substrate, rather than on membrane, is in very good agreement with theoretical predictions also shown. Based on these experimental results, we show that further refinements of the cavity design could lead to Q/V ratios close to 10(6).
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.15.016090