Experimental setup and realization of thin film specimens for microtensile tests

This paper describes a microtensile test system and the design as the realization of the samples dedicated to the tensile experiments. Two different technologies for the development of miniaturized specimens are detailed: self-standing tensile samples sustained by silicon frames and metal on polymer...

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Bibliographic Details
Published in:Review of scientific instruments 2009-02, Vol.80 (2), p.023901-023901
Main Authors: Malhaire, Christophe, Seguineau, Cédric, Ignat, Michel, Josserond, Charles, Debove, Laurent, Brida, Sebastiano, Desmarres, Jean-Michel, Lafontan, Xavier
Format: Article
Language:English
Subjects:
Chemical Sciences
Engineering Sciences
Material chemistry
Materials
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Summary:This paper describes a microtensile test system and the design as the realization of the samples dedicated to the tensile experiments. Two different technologies for the development of miniaturized specimens are detailed: self-standing tensile samples sustained by silicon frames and metal on polymer specimens obtained by laser cutting. The design of the samples has been optimized by means of finite element simulations. Aluminum beams with very large length on thickness ratio have been released from their silicon substrate using a standard etching process. Stress/strain curves are derived from experimental force/displacement values and discussed in terms of Young’s modulus values and critical parameters (flow and rupture stresses).
ISSN:0034-6748
1089-7623
DOI:10.1063/1.3077153