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Inter-Diffusion of cobalt and silicon through an ultrathin aluminum oxide layer
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Published in: | Applied surface science 2010, Vol.256, p.2731-2734 |
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Main Authors: | , , , , , , , , , , |
Format: | Article |
Language: | English |
Online Access: | Get full text |
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ISSN: | 0169-4332 1873-5584 |