Influence of a superficial field of residual stress on the propagation of surface waves—Applied to the estimation of the depth of the superficial stressed zone

In this study, we were interested in the dispersion of surface waves caused by the presence of a micrometric field of residual stress on the surface of an amorphous medium. We have shown that in relation to surface waves, a stressed structure like this is comparable to a layer on substrate type stru...

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Bibliographic Details
Published in:Applied physics letters 2012-12, Vol.101 (23), p.234104-1-3
Main Authors: Duquennoy, Marc, Ouaftouh, Mohammadi, Deboucq, Julien, Lefebvre, Jean-Etienne, Jenot, Frédéric, Ourak, Mohamed
Format: Article
Language:English
Subjects:
Dispersions
Engineering Sciences
Inverse method
Residual stress
Sensors
Surface waves
Wave propagation
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Summary:In this study, we were interested in the dispersion of surface waves caused by the presence of a micrometric field of residual stress on the surface of an amorphous medium. We have shown that in relation to surface waves, a stressed structure like this is comparable to a layer on substrate type structure. The design and implementation of SAW-IDT MEMS sensors enabled quasi-monochromatic Rayleigh-type surface waves to be generated and the dispersion phenomenon to be studied over a wide range of frequencies for different superficial fields of residual stress. The thicknesses of the stressed cortical zones were estimated with good accuracy using an inverse method.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4768434