A simple and inexpensive technique for PDMS/silicon chip alignment with sub-µm precision

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Bibliographic Details
Published in:Analytical methods 2014, Vol.6, p.97-101
Main Authors: Sivakumarasamy, R., Nishiguchi, K., Fujiwra, A., Vuillaume, Dominique, Clement, N.
Format: Article
Language:English
Subjects:
Engineering Sciences
Online Access:Get full text
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ISSN:1759-9660
DOI:10.1039/c3ay41618f