Modal Decomposition in Goalpost Micro/Nano Electro-Mechanical Devices

We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Q s and good linear properties. Numerical simulations have been realized to fit the resonance frequen...

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Bibliographic Details
Published in:Journal of low temperature physics 2014-04, Vol.175 (1-2), p.442-448
Main Authors: Collin, E., Defoort, M., Lulla, K. J., Guidi, J., Dufresnes, S., Godfrin, H.
Format: Article
Language:English
Subjects:
Bars
Characterization and Evaluation of Materials
Condensed Matter
Condensed Matter Physics
Devices
Distortion
Exact solutions
Low temperature physics
Magnetic Materials
Magnetism
Mathematical analysis
Mathematical models
Mesoscopic Systems and Quantum Hall Effect
Nanostructure
Physics
Physics and Astronomy
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Summary:We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2 K in vacuum, demonstrating high Q s and good linear properties. Numerical simulations have been realized to fit the resonance frequencies and produce the mode shapes. These mode shapes are complex, since they involve distortions of two coupled orthogonal bars. Nonetheless, analytic expressions have been developed to reproduce these numerical results, with no free parameters. Owing to their generality they are extremely helpful, in particular to identify the parameters which may limit the performances of the device. The overall agreement is very good, and has been verified on our nano-mechanical version of the device.
ISSN:0022-2291
1573-7357
DOI:10.1007/s10909-013-0919-1