Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope

A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardme...

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Bibliographic Details
Published in:Ultramicroscopy 2012-04, Vol.115, p.115-119
Main Authors: Bouscaud, Denis, Pesci, Raphaël, Berveiller, Sophie, Patoor, Etienne
Format: Article
Language:English
Subjects:
Engineering Sciences
Kossel microdiffraction
Lattice parameter
Materials
Micro and nanotechnologies
Microelectronics
Scanning electron microscope
Specimen heating
X-rays spatial resolution
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Summary:A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced. ► The temperature rise is calculated from precise lattice parameters measurement. ► Cu and Ge specimens heating due to the electron-beam bombardment is studied. ► The spatial resolution of Kossel diffraction is compared to Monte-Carlo simulations.
ISSN:0304-3991
1879-2723
DOI:10.1016/j.ultramic.2012.01.018