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Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope
A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardme...
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Published in: | Ultramicroscopy 2012-04, Vol.115, p.115-119 |
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description | A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.
► The temperature rise is calculated from precise lattice parameters measurement. ► Cu and Ge specimens heating due to the electron-beam bombardment is studied. ► The spatial resolution of Kossel diffraction is compared to Monte-Carlo simulations. |
doi_str_mv | 10.1016/j.ultramic.2012.01.018 |
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fullrecord | <record><control><sourceid>proquest_hal_p</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_hal_00951877v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0304399112000307</els_id><sourcerecordid>1009128511</sourcerecordid><originalsourceid>FETCH-LOGICAL-c450t-34c1b8c2b50eb05210610f4d35756a9e19db385e8cd63b595ae70a10db8585ea3</originalsourceid><addsrcrecordid>eNqFkc9u1DAQxi0EokvhFSof4ZBl7MT5c6OqCkWsxAUkbpZjT1ivHHuxk0r7NLwqzqbdK9JIlmd-8409HyE3DLYMWP3xsJ3dFNVo9ZYD41tgOdoXZMPapit4w8uXZAMlVEXZdeyKvEnpAAAMqvY1ueK8qipedRvy9z5NdlSTDZ6GgU57pOhQTzHfe1RjYb2ZNRqajqjtiJ7uMdP-N1XerPhopykDv4qoTilzuawcjZiCm8-6_Yl-Cymho_m5MRg7DFHpc8l6qmjSyvtF8jL5zCUdjviWvBqUS_ju6bwmPz_f_7h7KHbfv3y9u90VuhIwFWWlWd9q3gvAHgRnUDMYKlOKRtSqQ9aZvmwFttrUZS86obABxcD0rchpVV6TD6vuXjl5jHkl8SSDsvLhdieXHEAn8m6bR5bZ9yt7jOHPjGmSo00anVMew5wkyyzjrWALWq_o8p8UcbhoM5CLkfIgn42Ui5ESWI42N948zZj7Ec2l7dm5DHxaAcxbebQYZdIWfbbKxrxFaYL934x_TNW1Pg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1009128511</pqid></control><display><type>article</type><title>Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope</title><source>ScienceDirect Journals</source><creator>Bouscaud, Denis ; Pesci, Raphaël ; Berveiller, Sophie ; Patoor, Etienne</creator><creatorcontrib>Bouscaud, Denis ; Pesci, Raphaël ; Berveiller, Sophie ; Patoor, Etienne</creatorcontrib><description>A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.
► The temperature rise is calculated from precise lattice parameters measurement. ► Cu and Ge specimens heating due to the electron-beam bombardment is studied. ► The spatial resolution of Kossel diffraction is compared to Monte-Carlo simulations.</description><identifier>ISSN: 0304-3991</identifier><identifier>EISSN: 1879-2723</identifier><identifier>DOI: 10.1016/j.ultramic.2012.01.018</identifier><identifier>PMID: 22444249</identifier><language>eng</language><publisher>Netherlands: Elsevier B.V</publisher><subject>Engineering Sciences ; Kossel microdiffraction ; Lattice parameter ; Materials ; Micro and nanotechnologies ; Microelectronics ; Scanning electron microscope ; Specimen heating ; X-rays spatial resolution</subject><ispartof>Ultramicroscopy, 2012-04, Vol.115, p.115-119</ispartof><rights>2012 Elsevier B.V.</rights><rights>Copyright © 2012 Elsevier B.V. All rights reserved.</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c450t-34c1b8c2b50eb05210610f4d35756a9e19db385e8cd63b595ae70a10db8585ea3</citedby><cites>FETCH-LOGICAL-c450t-34c1b8c2b50eb05210610f4d35756a9e19db385e8cd63b595ae70a10db8585ea3</cites><orcidid>0000-0002-0264-1413</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,780,784,885,27924,27925</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/22444249$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink><backlink>$$Uhttps://hal.science/hal-00951877$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Bouscaud, Denis</creatorcontrib><creatorcontrib>Pesci, Raphaël</creatorcontrib><creatorcontrib>Berveiller, Sophie</creatorcontrib><creatorcontrib>Patoor, Etienne</creatorcontrib><title>Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope</title><title>Ultramicroscopy</title><addtitle>Ultramicroscopy</addtitle><description>A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.
► The temperature rise is calculated from precise lattice parameters measurement. ► Cu and Ge specimens heating due to the electron-beam bombardment is studied. ► The spatial resolution of Kossel diffraction is compared to Monte-Carlo simulations.</description><subject>Engineering Sciences</subject><subject>Kossel microdiffraction</subject><subject>Lattice parameter</subject><subject>Materials</subject><subject>Micro and nanotechnologies</subject><subject>Microelectronics</subject><subject>Scanning electron microscope</subject><subject>Specimen heating</subject><subject>X-rays spatial resolution</subject><issn>0304-3991</issn><issn>1879-2723</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNqFkc9u1DAQxi0EokvhFSof4ZBl7MT5c6OqCkWsxAUkbpZjT1ivHHuxk0r7NLwqzqbdK9JIlmd-8409HyE3DLYMWP3xsJ3dFNVo9ZYD41tgOdoXZMPapit4w8uXZAMlVEXZdeyKvEnpAAAMqvY1ueK8qipedRvy9z5NdlSTDZ6GgU57pOhQTzHfe1RjYb2ZNRqajqjtiJ7uMdP-N1XerPhopykDv4qoTilzuawcjZiCm8-6_Yl-Cymho_m5MRg7DFHpc8l6qmjSyvtF8jL5zCUdjviWvBqUS_ju6bwmPz_f_7h7KHbfv3y9u90VuhIwFWWlWd9q3gvAHgRnUDMYKlOKRtSqQ9aZvmwFttrUZS86obABxcD0rchpVV6TD6vuXjl5jHkl8SSDsvLhdieXHEAn8m6bR5bZ9yt7jOHPjGmSo00anVMew5wkyyzjrWALWq_o8p8UcbhoM5CLkfIgn42Ui5ESWI42N948zZj7Ec2l7dm5DHxaAcxbebQYZdIWfbbKxrxFaYL934x_TNW1Pg</recordid><startdate>20120401</startdate><enddate>20120401</enddate><creator>Bouscaud, Denis</creator><creator>Pesci, Raphaël</creator><creator>Berveiller, Sophie</creator><creator>Patoor, Etienne</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>1XC</scope><scope>VOOES</scope><orcidid>https://orcid.org/0000-0002-0264-1413</orcidid></search><sort><creationdate>20120401</creationdate><title>Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope</title><author>Bouscaud, Denis ; Pesci, Raphaël ; Berveiller, Sophie ; Patoor, Etienne</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c450t-34c1b8c2b50eb05210610f4d35756a9e19db385e8cd63b595ae70a10db8585ea3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Engineering Sciences</topic><topic>Kossel microdiffraction</topic><topic>Lattice parameter</topic><topic>Materials</topic><topic>Micro and nanotechnologies</topic><topic>Microelectronics</topic><topic>Scanning electron microscope</topic><topic>Specimen heating</topic><topic>X-rays spatial resolution</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bouscaud, Denis</creatorcontrib><creatorcontrib>Pesci, Raphaël</creatorcontrib><creatorcontrib>Berveiller, Sophie</creatorcontrib><creatorcontrib>Patoor, Etienne</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>Ultramicroscopy</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bouscaud, Denis</au><au>Pesci, Raphaël</au><au>Berveiller, Sophie</au><au>Patoor, Etienne</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope</atitle><jtitle>Ultramicroscopy</jtitle><addtitle>Ultramicroscopy</addtitle><date>2012-04-01</date><risdate>2012</risdate><volume>115</volume><spage>115</spage><epage>119</epage><pages>115-119</pages><issn>0304-3991</issn><eissn>1879-2723</eissn><abstract>A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.
► The temperature rise is calculated from precise lattice parameters measurement. ► Cu and Ge specimens heating due to the electron-beam bombardment is studied. ► The spatial resolution of Kossel diffraction is compared to Monte-Carlo simulations.</abstract><cop>Netherlands</cop><pub>Elsevier B.V</pub><pmid>22444249</pmid><doi>10.1016/j.ultramic.2012.01.018</doi><tpages>5</tpages><orcidid>https://orcid.org/0000-0002-0264-1413</orcidid><oa>free_for_read</oa></addata></record> |
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subjects | Engineering Sciences Kossel microdiffraction Lattice parameter Materials Micro and nanotechnologies Microelectronics Scanning electron microscope Specimen heating X-rays spatial resolution |
title | Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope |
url | http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T14%3A49%3A40IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_hal_p&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Estimation%20of%20the%20electron%20beam-induced%20specimen%20heating%20and%20the%20emitted%20X-rays%20spatial%20resolution%20by%20Kossel%20microdiffraction%20in%20a%20scanning%20electron%20microscope&rft.jtitle=Ultramicroscopy&rft.au=Bouscaud,%20Denis&rft.date=2012-04-01&rft.volume=115&rft.spage=115&rft.epage=119&rft.pages=115-119&rft.issn=0304-3991&rft.eissn=1879-2723&rft_id=info:doi/10.1016/j.ultramic.2012.01.018&rft_dat=%3Cproquest_hal_p%3E1009128511%3C/proquest_hal_p%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c450t-34c1b8c2b50eb05210610f4d35756a9e19db385e8cd63b595ae70a10db8585ea3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=1009128511&rft_id=info:pmid/22444249&rfr_iscdi=true |