Growth mechanism investigation of SnO2 thin films deposited by aerosol pyrolysis for biosensor applications: Importance of the thickness

• Published in: Thin solid films 2012-03, Vol.520 (11), p.3878-3883
• Main Authors: Stambouli, Valérie, Manesse, Maël, Férrieu, Frédéric, Rapenne, Laetitia, Roussel, Hervé, Chaudouët, Patrick, Szunerits, Sabine
• Format: Article
• Language: English
• Subjects: Biosensors; Biotechnology; Chemical Sciences; Computer Science; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; DNA sensors; Exact sciences and technology; Film thickness; General equipment and techniques; Growth; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Life Sciences; Material chemistry; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Microstructure; Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Resistivity; Roughness; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Theory and models of film growth; Thin film structure and morphology; Tin oxide film
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2012.01.022

Transparent conductive oxide films are suitable sensitive layers for gas sensors and biosensors, provided that their intrinsic properties are controlled, notably considering their thickness dependence. The present paper reports on a study of the variation of some physical properties of polycrystalline Sb doped SnO2 films according to the film thickness. Films were deposited onto Si and glass substrates by aerosol pyrolysis. Their thickness was varied in a range of 20–280nm. The electrical resistivity, the roughness, the optical constant, the microstructure and the texture were investigated. Correlated evolutions of the resistivity and the surface roughness are found in relation with the evolutions of both the microstructure and the texture. Two main successive growth steps were evidenced which are delimited by a critical film thickness. Below this thickness of approximately 100–120nm, a strong dependence of physical properties with the thickness is evidenced whereas for thicker films no significant change is evidenced. A two-step growth model is proposed to explain this behaviour. This mechanism growth is to be considered in view of the integration of SnO2 films as sensitive layers in biosensors. Notably, in the case of biosensors based on the label-free electrochemical detection of biomolecules, it is recommended to use films with thicknesses ranging above the critical thickness value of 100–120nm in order to obtain optimized, reproducible and comparable responses of biosensors. ► Dense and crystalline SnO2 thin films are deposited by aerosol pyrolysis technique. ► Two-step growth mechanism is delimited by a critical film thickness. ► Thickness dependence of the film physical properties.