A dual axis CMOS micromachined convective thermal accelerometer

We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central suspended hot plate creates a hot gas bubble. In-plane acceleration applied to the body will change the temperature distribution on the d...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2011-11, Vol.170 (1), p.44-50
Main Authors: Garraud, Alexandra, Giani, Alain, Combette, Philippe, Charlot, Benoît, Richard, Mathieu
Format: Article
Language:English
Subjects:
Accelerometer
Accelerometers
Actuators
CMOS
Convection
Devices
Electronics
Engineering Sciences
MEMS
Micromachining
Micromechanics
Natural convection
Thermal
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Summary:We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central suspended hot plate creates a hot gas bubble. In-plane acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially connected thermocouples. The paper will present the modelling of the device with a specific spherical model as well as measurements of sensitivity and linearity.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2011.05.029