A dual axis CMOS micromachined convective thermal accelerometer

We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central suspended hot plate creates a hot gas bubble. In-plane acceleration applied to the body will change the temperature distribution on the d...

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Published in:Sensors and actuators. A. Physical. 2011-11, Vol.170 (1), p.44-50
Main Authors: Garraud, Alexandra, Giani, Alain, Combette, Philippe, Charlot, Benoît, Richard, Mathieu
Format: Article
Language:English
Subjects:
Accelerometer
Accelerometers
Actuators
CMOS
Convection
Devices
Electronics
Engineering Sciences
MEMS
Micromachining
Micromechanics
Natural convection
Thermal
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cited_by cdi_FETCH-LOGICAL-c429t-10088e5f31d8bc1f0ef672703e8eedd48c0d0a377f2ddc570a54311d55fe85d3
cites cdi_FETCH-LOGICAL-c429t-10088e5f31d8bc1f0ef672703e8eedd48c0d0a377f2ddc570a54311d55fe85d3
container_end_page 50
container_issue 1
container_start_page 44
container_title Sensors and actuators. A. Physical.
container_volume 170
creator Garraud, Alexandra
Giani, Alain
Combette, Philippe
Charlot, Benoît
Richard, Mathieu
description We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central suspended hot plate creates a hot gas bubble. In-plane acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially connected thermocouples. The paper will present the modelling of the device with a specific spherical model as well as measurements of sensitivity and linearity.
doi_str_mv 10.1016/j.sna.2011.05.029
format article
fullrecord <record><control><sourceid>proquest_hal_p</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_hal_01616085v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0924424711003682</els_id><sourcerecordid>926297655</sourcerecordid><originalsourceid>FETCH-LOGICAL-c429t-10088e5f31d8bc1f0ef672703e8eedd48c0d0a377f2ddc570a54311d55fe85d3</originalsourceid><addsrcrecordid>eNp9kE1LxDAQhoMouK7-AG-9iYfWSdo0KR5kWfyClT249xCTKZulH2vSXfTfm1Lx6GlgeN6XmYeQawoZBVre7bLQ6YwBpRnwDFh1QmZUijzNoaxOyQwqVqQFK8Q5uQhhBwB5LsSMPCwSe9BNor9cSJZv6_ekdcb3rTZb16FNTN8d0QzuiMmwRd-OqDHYYGRwQH9JzmrdBLz6nXOyeXrcLF_S1fr5dblYpaZg1ZBSACmR1zm18sPQGrAuBROQo0S0tpAGLOh4Uc2sNVyA5kVOqeW8RsltPie3U-1WN2rvXav9t-q1Uy-LlRp30QEtQfIjjezNxO59_3nAMKjWhXhyozvsD0FVrGSVKDmPJJ3I-HEIHuu_agpq1Kp2KmpVo1YFXEWtMXM_ZTB-e3ToVTAOO4PW-ShK2d79k_4BKQZ-0w</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>926297655</pqid></control><display><type>article</type><title>A dual axis CMOS micromachined convective thermal accelerometer</title><source>ScienceDirect Freedom Collection 2022-2024</source><creator>Garraud, Alexandra ; Giani, Alain ; Combette, Philippe ; Charlot, Benoît ; Richard, Mathieu</creator><creatorcontrib>Garraud, Alexandra ; Giani, Alain ; Combette, Philippe ; Charlot, Benoît ; Richard, Mathieu</creatorcontrib><description>We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central suspended hot plate creates a hot gas bubble. In-plane acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially connected thermocouples. The paper will present the modelling of the device with a specific spherical model as well as measurements of sensitivity and linearity.</description><identifier>ISSN: 0924-4247</identifier><identifier>EISSN: 1873-3069</identifier><identifier>DOI: 10.1016/j.sna.2011.05.029</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Accelerometer ; Accelerometers ; Actuators ; CMOS ; Convection ; Devices ; Electronics ; Engineering Sciences ; MEMS ; Micromachining ; Micromechanics ; Natural convection ; Thermal</subject><ispartof>Sensors and actuators. A. Physical., 2011-11, Vol.170 (1), p.44-50</ispartof><rights>2011 Elsevier B.V.</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c429t-10088e5f31d8bc1f0ef672703e8eedd48c0d0a377f2ddc570a54311d55fe85d3</citedby><cites>FETCH-LOGICAL-c429t-10088e5f31d8bc1f0ef672703e8eedd48c0d0a377f2ddc570a54311d55fe85d3</cites><orcidid>0000-0003-1634-7335 ; 0000-0001-7178-1949</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,780,784,885,27924,27925</link.rule.ids><backlink>$$Uhttps://hal.science/hal-01616085$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Garraud, Alexandra</creatorcontrib><creatorcontrib>Giani, Alain</creatorcontrib><creatorcontrib>Combette, Philippe</creatorcontrib><creatorcontrib>Charlot, Benoît</creatorcontrib><creatorcontrib>Richard, Mathieu</creatorcontrib><title>A dual axis CMOS micromachined convective thermal accelerometer</title><title>Sensors and actuators. A. Physical.</title><description>We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central suspended hot plate creates a hot gas bubble. In-plane acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially connected thermocouples. The paper will present the modelling of the device with a specific spherical model as well as measurements of sensitivity and linearity.</description><subject>Accelerometer</subject><subject>Accelerometers</subject><subject>Actuators</subject><subject>CMOS</subject><subject>Convection</subject><subject>Devices</subject><subject>Electronics</subject><subject>Engineering Sciences</subject><subject>MEMS</subject><subject>Micromachining</subject><subject>Micromechanics</subject><subject>Natural convection</subject><subject>Thermal</subject><issn>0924-4247</issn><issn>1873-3069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNp9kE1LxDAQhoMouK7-AG-9iYfWSdo0KR5kWfyClT249xCTKZulH2vSXfTfm1Lx6GlgeN6XmYeQawoZBVre7bLQ6YwBpRnwDFh1QmZUijzNoaxOyQwqVqQFK8Q5uQhhBwB5LsSMPCwSe9BNor9cSJZv6_ekdcb3rTZb16FNTN8d0QzuiMmwRd-OqDHYYGRwQH9JzmrdBLz6nXOyeXrcLF_S1fr5dblYpaZg1ZBSACmR1zm18sPQGrAuBROQo0S0tpAGLOh4Uc2sNVyA5kVOqeW8RsltPie3U-1WN2rvXav9t-q1Uy-LlRp30QEtQfIjjezNxO59_3nAMKjWhXhyozvsD0FVrGSVKDmPJJ3I-HEIHuu_agpq1Kp2KmpVo1YFXEWtMXM_ZTB-e3ToVTAOO4PW-ShK2d79k_4BKQZ-0w</recordid><startdate>20111101</startdate><enddate>20111101</enddate><creator>Garraud, Alexandra</creator><creator>Giani, Alain</creator><creator>Combette, Philippe</creator><creator>Charlot, Benoît</creator><creator>Richard, Mathieu</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>1XC</scope><orcidid>https://orcid.org/0000-0003-1634-7335</orcidid><orcidid>https://orcid.org/0000-0001-7178-1949</orcidid></search><sort><creationdate>20111101</creationdate><title>A dual axis CMOS micromachined convective thermal accelerometer</title><author>Garraud, Alexandra ; Giani, Alain ; Combette, Philippe ; Charlot, Benoît ; Richard, Mathieu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c429t-10088e5f31d8bc1f0ef672703e8eedd48c0d0a377f2ddc570a54311d55fe85d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Accelerometer</topic><topic>Accelerometers</topic><topic>Actuators</topic><topic>CMOS</topic><topic>Convection</topic><topic>Devices</topic><topic>Electronics</topic><topic>Engineering Sciences</topic><topic>MEMS</topic><topic>Micromachining</topic><topic>Micromechanics</topic><topic>Natural convection</topic><topic>Thermal</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Garraud, Alexandra</creatorcontrib><creatorcontrib>Giani, Alain</creatorcontrib><creatorcontrib>Combette, Philippe</creatorcontrib><creatorcontrib>Charlot, Benoît</creatorcontrib><creatorcontrib>Richard, Mathieu</creatorcontrib><collection>CrossRef</collection><collection>Mechanical &amp; Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Hyper Article en Ligne (HAL)</collection><jtitle>Sensors and actuators. A. Physical.</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Garraud, Alexandra</au><au>Giani, Alain</au><au>Combette, Philippe</au><au>Charlot, Benoît</au><au>Richard, Mathieu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A dual axis CMOS micromachined convective thermal accelerometer</atitle><jtitle>Sensors and actuators. A. Physical.</jtitle><date>2011-11-01</date><risdate>2011</risdate><volume>170</volume><issue>1</issue><spage>44</spage><epage>50</epage><pages>44-50</pages><issn>0924-4247</issn><eissn>1873-3069</eissn><abstract>We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central suspended hot plate creates a hot gas bubble. In-plane acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially connected thermocouples. The paper will present the modelling of the device with a specific spherical model as well as measurements of sensitivity and linearity.</abstract><pub>Elsevier B.V</pub><doi>10.1016/j.sna.2011.05.029</doi><tpages>7</tpages><orcidid>https://orcid.org/0000-0003-1634-7335</orcidid><orcidid>https://orcid.org/0000-0001-7178-1949</orcidid></addata></record>
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issn 0924-4247
1873-3069
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subjects Accelerometer
Accelerometers
Actuators
CMOS
Convection
Devices
Electronics
Engineering Sciences
MEMS
Micromachining
Micromechanics
Natural convection
Thermal
title A dual axis CMOS micromachined convective thermal accelerometer
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T02%3A52%3A50IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_hal_p&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%20dual%20axis%20CMOS%20micromachined%20convective%20thermal%20accelerometer&rft.jtitle=Sensors%20and%20actuators.%20A.%20Physical.&rft.au=Garraud,%20Alexandra&rft.date=2011-11-01&rft.volume=170&rft.issue=1&rft.spage=44&rft.epage=50&rft.pages=44-50&rft.issn=0924-4247&rft.eissn=1873-3069&rft_id=info:doi/10.1016/j.sna.2011.05.029&rft_dat=%3Cproquest_hal_p%3E926297655%3C/proquest_hal_p%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c429t-10088e5f31d8bc1f0ef672703e8eedd48c0d0a377f2ddc570a54311d55fe85d3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=926297655&rft_id=info:pmid/&rfr_iscdi=true