On the elastic modulus and hardness of co-sputtered Zr–Cu–(N) thin metal glass films

• Published in: Surface & coatings technology 2012-04, Vol.206 (17), p.3567-3571
• Main Authors: Coddet, P., Sanchette, F., Rousset, J.C., Rapaud, O., Coddet, C.
• Format: Article
• Language: English
• Subjects: Amorphous alloys; Applied sciences; Chemical Sciences; Co-sputtering; Cross-disciplinary physics: materials science; rheology; Engineering Sciences; Exact sciences and technology; Hardness; Material chemistry; Materials; Materials science; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology; Metals. Metallurgy; Methods of deposition of films and coatings; film growth and epitaxy; Nanoindentation; or physical chemistry; Physics; Production techniques; Surface treatment; Surface treatments; Theoretical and; Thin Film Metallic Glasses (TFMG); Young's modulus
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2012.02.036

This work focuses on the properties of Zr–Cu–(N) deposits obtained by magnetron co-sputtering of Zr and Cu targets in pure argon or in argon nitrogen gas mixtures. Microstructure and mechanical properties (hardness and Young's modulus) were investigated versus deposition parameters. The composition of the Zr–Cu alloy films on the full binary range was accurately controlled by means of the discharge current intensity on both Zr and Cu targets. Deposits were observed to be amorphous single phased in a large range of copper content, the hardness and Young's modulus of the amorphous phase increasing with the latter. A small amount of nitrogen in the gas mixture leads to higher hardness and Young's modulus values. ► Zr–Cu–(N) coatings are co-sputtered from metallic Zr and Cu targets. ► Relationships between the deposition conditions and properties are studied. ► The composition, the structure, the hardness and the Young modulus are observed. ► The structure evolution obtained by the addition of nitrogen is observed.