Direct Laser Patterning of a Gas Sensor on Flexible Substrate

Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported. The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation...

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Bibliographic Details
Published in:Procedia engineering 2014, Vol.87, p.899-902
Main Authors: Acuautla, M., Bernardini, S., Gallais, L., Bendahan, M.
Format: Article
Language:English
Subjects:
Engineering Sciences
flexible substrate
gas sensor
Kapton
Laser patterning
Micro and nanotechnologies
Microelectronics
ZnO nanoparticles
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Summary:Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported. The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation and its electrical properties have been also studied. The gas sensing properties were investigated using a commercial ink of ZnO nanoparticles at several concentrations and temperatures. The sensor presents excellent responses toward ammonia and ozone at 300°C and 200 C° respectively, with good reproducibility, and fast response and recovery time in a wide range of concentrations.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2014.11.300