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Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide
A method is proposed to determine the origin and the spatial oxide fixed charge repartition in memory tunnel oxide from Fowler–Nordheim current measurements after electrical stress. The Poisson equation resolution in the dielectric layer is required to account for the nonsymmetric tunneling barrier...
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Published in: | Applied physics letters 2004-05, Vol.84 (21), p.4251-4253 |
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container_issue | 21 |
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container_title | Applied physics letters |
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creator | Bernardini, Sandrine Masson, Pascal Houssa, Michel Lalande, Frederic |
description | A method is proposed to determine the origin and the spatial oxide fixed charge repartition in memory tunnel oxide from Fowler–Nordheim current measurements after electrical stress. The Poisson equation resolution in the dielectric layer is required to account for the nonsymmetric tunneling barrier deformation, resulting from charges generated within the dielectric layer. From current–voltage characteristics measurements and simulations, we have determined the spatial distribution of the oxide fixed charges within the dielectric layer of metal/SiO2/metal structures. In addition, the kinetics of the oxide charge generation can be explained by a dispersive hydrogen transport model. |
doi_str_mv | 10.1063/1.1756681 |
format | article |
fullrecord | <record><control><sourceid>hal_cross</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_hal_01633146v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>oai_HAL_hal_01633146v1</sourcerecordid><originalsourceid>FETCH-LOGICAL-c296t-e6870734dca5ca6703406e94a21cd6930508f2610bb5fbf153dd4a5ca7d476693</originalsourceid><addsrcrecordid>eNpFkLFOwzAURS0EEqUw8AdeGVL84sROxqoCihSpC8yWYz-nRmlS2Qa1f0-qVjA9vatzz3AJeQS2ACb4MyxAlkJUcEVmwKTMOEB1TWaMMZ6JuoRbchfj1_SWOecz0m2C7_xA9WBpwL0OySc_DnR0NG2RjgdvkTp_QEvNVocOI-1wwKDTlLRHij2aFLzRPY0pYIx0ku1wN4YjTd_DgP3ZcU9unO4jPlzunHy-vnys1lmzeXtfLZvM5LVIGYpKMskLa3RptJCMF0xgXegcjBU1ZyWrXC6AtW3pWgclt7Y4odIWUkzAnDydvVvdq33wOx2OatRerZeNOmUMBOdQiB_4Z00YYwzo_grA1GlNBeqyJv8FYeBm4g</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide</title><source>American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list)</source><source>American Institute of Physics</source><creator>Bernardini, Sandrine ; Masson, Pascal ; Houssa, Michel ; Lalande, Frederic</creator><creatorcontrib>Bernardini, Sandrine ; Masson, Pascal ; Houssa, Michel ; Lalande, Frederic</creatorcontrib><description>A method is proposed to determine the origin and the spatial oxide fixed charge repartition in memory tunnel oxide from Fowler–Nordheim current measurements after electrical stress. The Poisson equation resolution in the dielectric layer is required to account for the nonsymmetric tunneling barrier deformation, resulting from charges generated within the dielectric layer. From current–voltage characteristics measurements and simulations, we have determined the spatial distribution of the oxide fixed charges within the dielectric layer of metal/SiO2/metal structures. In addition, the kinetics of the oxide charge generation can be explained by a dispersive hydrogen transport model.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.1756681</identifier><language>eng</language><publisher>American Institute of Physics</publisher><subject>Engineering Sciences ; Micro and nanotechnologies ; Microelectronics</subject><ispartof>Applied physics letters, 2004-05, Vol.84 (21), p.4251-4253</ispartof><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c296t-e6870734dca5ca6703406e94a21cd6930508f2610bb5fbf153dd4a5ca7d476693</citedby><cites>FETCH-LOGICAL-c296t-e6870734dca5ca6703406e94a21cd6930508f2610bb5fbf153dd4a5ca7d476693</cites><orcidid>0000-0001-9673-222X</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,780,782,784,885,27924,27925</link.rule.ids><backlink>$$Uhttps://hal.science/hal-01633146$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Bernardini, Sandrine</creatorcontrib><creatorcontrib>Masson, Pascal</creatorcontrib><creatorcontrib>Houssa, Michel</creatorcontrib><creatorcontrib>Lalande, Frederic</creatorcontrib><title>Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide</title><title>Applied physics letters</title><description>A method is proposed to determine the origin and the spatial oxide fixed charge repartition in memory tunnel oxide from Fowler–Nordheim current measurements after electrical stress. The Poisson equation resolution in the dielectric layer is required to account for the nonsymmetric tunneling barrier deformation, resulting from charges generated within the dielectric layer. From current–voltage characteristics measurements and simulations, we have determined the spatial distribution of the oxide fixed charges within the dielectric layer of metal/SiO2/metal structures. In addition, the kinetics of the oxide charge generation can be explained by a dispersive hydrogen transport model.</description><subject>Engineering Sciences</subject><subject>Micro and nanotechnologies</subject><subject>Microelectronics</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2004</creationdate><recordtype>article</recordtype><recordid>eNpFkLFOwzAURS0EEqUw8AdeGVL84sROxqoCihSpC8yWYz-nRmlS2Qa1f0-qVjA9vatzz3AJeQS2ACb4MyxAlkJUcEVmwKTMOEB1TWaMMZ6JuoRbchfj1_SWOecz0m2C7_xA9WBpwL0OySc_DnR0NG2RjgdvkTp_QEvNVocOI-1wwKDTlLRHij2aFLzRPY0pYIx0ku1wN4YjTd_DgP3ZcU9unO4jPlzunHy-vnys1lmzeXtfLZvM5LVIGYpKMskLa3RptJCMF0xgXegcjBU1ZyWrXC6AtW3pWgclt7Y4odIWUkzAnDydvVvdq33wOx2OatRerZeNOmUMBOdQiB_4Z00YYwzo_grA1GlNBeqyJv8FYeBm4g</recordid><startdate>20040524</startdate><enddate>20040524</enddate><creator>Bernardini, Sandrine</creator><creator>Masson, Pascal</creator><creator>Houssa, Michel</creator><creator>Lalande, Frederic</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope><scope>VOOES</scope><orcidid>https://orcid.org/0000-0001-9673-222X</orcidid></search><sort><creationdate>20040524</creationdate><title>Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide</title><author>Bernardini, Sandrine ; Masson, Pascal ; Houssa, Michel ; Lalande, Frederic</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c296t-e6870734dca5ca6703406e94a21cd6930508f2610bb5fbf153dd4a5ca7d476693</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Engineering Sciences</topic><topic>Micro and nanotechnologies</topic><topic>Microelectronics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bernardini, Sandrine</creatorcontrib><creatorcontrib>Masson, Pascal</creatorcontrib><creatorcontrib>Houssa, Michel</creatorcontrib><creatorcontrib>Lalande, Frederic</creatorcontrib><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bernardini, Sandrine</au><au>Masson, Pascal</au><au>Houssa, Michel</au><au>Lalande, Frederic</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide</atitle><jtitle>Applied physics letters</jtitle><date>2004-05-24</date><risdate>2004</risdate><volume>84</volume><issue>21</issue><spage>4251</spage><epage>4253</epage><pages>4251-4253</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>A method is proposed to determine the origin and the spatial oxide fixed charge repartition in memory tunnel oxide from Fowler–Nordheim current measurements after electrical stress. The Poisson equation resolution in the dielectric layer is required to account for the nonsymmetric tunneling barrier deformation, resulting from charges generated within the dielectric layer. From current–voltage characteristics measurements and simulations, we have determined the spatial distribution of the oxide fixed charges within the dielectric layer of metal/SiO2/metal structures. In addition, the kinetics of the oxide charge generation can be explained by a dispersive hydrogen transport model.</abstract><pub>American Institute of Physics</pub><doi>10.1063/1.1756681</doi><tpages>3</tpages><orcidid>https://orcid.org/0000-0001-9673-222X</orcidid><oa>free_for_read</oa></addata></record> |
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source | American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list); American Institute of Physics |
subjects | Engineering Sciences Micro and nanotechnologies Microelectronics |
title | Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide |
url | http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-24T22%3A19%3A26IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-hal_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Origin%20and%20repartition%20of%20the%20oxide%20fixed%20charges%20generated%20by%20electrical%20stress%20in%20memory%20tunnel%20oxide&rft.jtitle=Applied%20physics%20letters&rft.au=Bernardini,%20Sandrine&rft.date=2004-05-24&rft.volume=84&rft.issue=21&rft.spage=4251&rft.epage=4253&rft.pages=4251-4253&rft.issn=0003-6951&rft.eissn=1077-3118&rft_id=info:doi/10.1063/1.1756681&rft_dat=%3Chal_cross%3Eoai_HAL_hal_01633146v1%3C/hal_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c296t-e6870734dca5ca6703406e94a21cd6930508f2610bb5fbf153dd4a5ca7d476693%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |