Influence of emissivity tailoring on radiative membranes thermal behavior for gas sensing applications

Suspended micro-hotplates acting as infrared emitting sources are privileged energy-efficient sources for intended use in optical gas sensors. For such sources, the main constraints are the maximum operating temperature and the battery-limited available energy per measurement. Using simulations that...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2015-07, Vol.213, p.53-58
Main Authors: Lefebvre, Anthony, Costantini, Daniele, Brucoli, Giovanni, Boutami, Salim, Greffet, Jean-Jacques, Benisty, Henri
Format: Article
Language:English
Subjects:
Arrays
CO2
Emissivity
Energy measurement
Gas sensing
Gas sensors
Heating
Hotplate
Infrared
Instrumentation and Detectors
Membrane
Membranes
MEMS
Metamaterial
Operating temperature
Optics
Physics
Resonators
Thermal properties
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Summary:Suspended micro-hotplates acting as infrared emitting sources are privileged energy-efficient sources for intended use in optical gas sensors. For such sources, the main constraints are the maximum operating temperature and the battery-limited available energy per measurement. Using simulations that take into account the dynamics of heating through the spatio-temporal radial profile, we first demonstrate how to design a thermally efficient membrane complying with these specifications. Once nonspecific thermal leaks are minimized, we show a further increase of the wall-plug efficiency by tailoring the membrane spectral emissivity with a metasurface in order to match the absorption spectrum of a gas of interest, e.g. CO2 in this study. We consider the effects of an array of plasmonic resonators on the overall efficiency, and show non-trivial favorable effects on the thermal balance of the system.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2015.02.056