Instantaneous one-angle white-light scatterometer

We present a white light scatterometer operating at a unique scattering direction. Mechanical motions and wavelength scans are removed. The technique provides an immediate flexible characterization of roughness with no loss of resolution.

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Bibliographic Details
Published in:Optics express 2018-01, Vol.26 (1), p.204-219
Main Authors: Amra, Claude, Zerrad, Myriam, Liukaityte, Simona, Lequime, Michel
Format: Article
Language:English
Subjects:
Electromagnetism
Engineering Sciences
Optics
Photonic
Physics
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Description
Summary:We present a white light scatterometer operating at a unique scattering direction. Mechanical motions and wavelength scans are removed. The technique provides an immediate flexible characterization of roughness with no loss of resolution.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.26.000204