Optical properties of ultrathin Al2O3/ZnO nanolaminates

Because of their high resistance against ultraviolet and high energy particles, ultrathin amorphous nanolaminates can be very attractive for aerospace application. Here we report on the optical and structural properties of ultrathin Al2O3/ZnO nanolaminates deposited by Atomic Layer Deposition. Struc...

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Bibliographic Details
Published in:Thin solid films 2015-11, Vol.594, p.96-100
Main Authors: Viter, R., Baleviciute, I., Abou Chaaya, A., Mikoliunaite, L., Balevicius, Z., Ramanavicius, A., Zalesska, A., Vataman, V., Smyntyna, V., Gertnere, Z., Erts, D., Miele, P., Bechelany, M.
Format: Article
Language:English
Subjects:
Aluminum oxide
Amorphous nanolaminates
Atomic Layer Deposition
Chemical Sciences
Deposition
Ellipsometry
Nanostructure
Optical properties
Regression analysis
Spectroscopy
Ultrathin films
Zinc oxide
ZnO
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Summary:Because of their high resistance against ultraviolet and high energy particles, ultrathin amorphous nanolaminates can be very attractive for aerospace application. Here we report on the optical and structural properties of ultrathin Al2O3/ZnO nanolaminates deposited by Atomic Layer Deposition. Structural properties of nanolaminates were studied by GIXRD and AFM. Optical characterization was performed by transmittance, spectroscopic ellipsometry and photoluminescence (PL) spectroscopy. Regression analysis of ellipsometric spectra has shown that absorption peak decreases and blue shifted with the decrease of bilayer thickness in the stack. On the basis of the analysis of structural and optical properties of ultrathin nanolaminates, the amorphous nature of them is suggested. •Ultrathin amorphous nanolaminates are very attractive for aerospace application.•Ultrathin Al2O3/ZnO nanolaminates were deposited by Atomic Layer Deposition.•Optical and structural properties were investigated.•Absorption peak decreases and blue shifted with the decrease of bilayer thickness.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2015.10.018