Study of porous silicon substrates for the monolithic integration of radiofrequency circuits

The silicon/porous silicon (PS) hybrid substrate is an interesting candidate for the monolithic integration of radiofrequency (RF) circuits. Thus, passive components can be integrated on the insulating PS regions close to the active devices integrated on silicon. Regarding silicon, hybrid substrates...

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Bibliographic Details
Published in:International journal of microwave and wireless technologies 2014-02, Vol.6 (1), p.39-43
Main Authors: Capelle, Marie, Billoué, Jérome, Poveda, Patrick, Gautier, Gael
Format: Article
Language:English
Subjects:
Engineering Sciences
Micro and nanotechnologies
Microelectronics
Research Papers
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Summary:The silicon/porous silicon (PS) hybrid substrate is an interesting candidate for the monolithic integration of radiofrequency (RF) circuits. Thus, passive components can be integrated on the insulating PS regions close to the active devices integrated on silicon. Regarding silicon, hybrid substrates allow the improvement of RF circuits performances. To demonstrate it, coplanar waveguides have been integrated on glass, silicon, and localized PS substrates. The characterization results show that the substrate losses are reduced with PS.
ISSN:1759-0787
1759-0795
DOI:10.1017/S1759078713001050