Flat-top and patterned-topped cone gratings for visible and mid-infrared antireflective properties

Achieving a broadband antireflection property from material surfaces is one of the highest priorities for those who want to improve the efficiency of solar cells or the sensitivity of photo-detectors. To lower the reflectance of a surface, we are concerned with the study of the optical response of f...

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Bibliographic Details
Published in:Optics express 2013-07, Vol.21 (13), p.16043-16055
Main Authors: Brückner, Jean-Baptiste, Le Rouzo, Judikaël, Escoubas, Ludovic, Berginc, Gérard, Gourgon, Cécile, Desplats, Olivier, Simon, Jean-Jacques
Format: Article
Language:English
Subjects:
Engineering Sciences
Micro and nanotechnologies
Microelectronics
Optics
Photonic
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Summary:Achieving a broadband antireflection property from material surfaces is one of the highest priorities for those who want to improve the efficiency of solar cells or the sensitivity of photo-detectors. To lower the reflectance of a surface, we are concerned with the study of the optical response of flat-top and patterned-topped cone shaped silicon gratings, based on previous work exploring pyramid gratings. Through rigorous numerical methods such as Finite Different Time Domain, we first designed several flat-top structures that theoretically demonstrate an antireflective character within the middle infrared region. From the opto-geometrical parameters such as period, depth and shape of the pattern determined by numerical analysis, these structures have been fabricated using controlled slope plasma etching processes. In order to extend the antireflective properties up to the visible wavelengths, patterned-topped cones have been fabricated as well. Afterwards, optical characterizations of several samples were carried out. Thus, the performances of the flat-top and patterned-topped cones have been compared in the visible and mid infrared range.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.21.016043