Electrons elastically backscattered from Al, Ag and Au samples

The objective of this study is to exhibit the capability of Monte-Carlo simulation in the frame of surface spectroscopy using elastically reflected electrons. Our computer programme is based on sample descriptions as stackings of atomic layers. Results allow us information on important parameters as...

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Bibliographic Details
Published in:Vacuum 1998-05, Vol.50 (1), p.237-242
Main Authors: Gruzza, B, Robert, C, Peuchot, B, Bideux, L
Format: Article
Language:English
Subjects:
Applied sciences
Clean metal, semiconductor, and insulator surfaces
Condensed Matter
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electron and ion emission by liquids and solids
impact phenomena
Engineering Sciences
Exact sciences and technology
Materials Science
Metals. Metallurgy
Micro and nanotechnologies
Microelectronics
Photoemission and photoelectron spectra
Physics
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Summary:The objective of this study is to exhibit the capability of Monte-Carlo simulation in the frame of surface spectroscopy using elastically reflected electrons. Our computer programme is based on sample descriptions as stackings of atomic layers. Results allow us information on important parameters as the penetration depth of the electron beam or angular reflections. The programme has the capability for performing 3 D mapping of the backscattered electrons. Measurements of the percentage of the reflected current are depending on the geometry of the analysis system. This can be shown by the relief of the three dimensional patterns.
ISSN:0042-207X
1879-2715
DOI:10.1016/S0042-207X(98)00106-7