Automatic localization of signal sources in photon emission images for integrated circuit analysis

Defects localization is a key step in failure analysis of highly scaled complementary oxide semiconductor integrated circuits (ICs). It gives prior information on VLSI circuits and allows the designers to improve their diagnostic. Light emission techniques are efficient to localize defects in modern...

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Bibliographic Details
Published in:Signal, image and video processing image and video processing, 2018-05, Vol.12 (4), p.775-782
Main Authors: Boscaro, Anthony, Jacquir, Sabir, Chef, Samuel, Sanchez, Kevin, Perdu, Philippe, Binczak, Stéphane
Format: Article
Language:English
Subjects:
Circuit design
Computer Imaging
Computer Science
Computer simulation
Defects
Diagnostic systems
Emission analysis
Engineering Sciences
Failure analysis
Filtration
Image Processing and Computer Vision
Integrated circuits
Light emission
Localization
Mathematical morphology
Multimedia Information Systems
Optics
Original Paper
Pattern Recognition and Graphics
Photon emission
Photonic
Signal and Image processing
Signal,Image and Speech Processing
Very large scale integration
Vision
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Summary:Defects localization is a key step in failure analysis of highly scaled complementary oxide semiconductor integrated circuits (ICs). It gives prior information on VLSI circuits and allows the designers to improve their diagnostic. Light emission techniques are efficient to localize defects in modern ICs. The identification of the emission spots is an essential step of the process because it shows where is located the electrical activity in the chip. Due to scaling, more and more emission nodes are located within the acquisition area so that large variations of emission intensity can exist. Thresholding techniques have been implemented, but they fail to provide an exhaustive localization. To overcome this problem, we introduce in this paper an automatic unsupervised process. It is based on a combination of median filtering, mathematical morphology and local maxima research. This new approach is evaluated and tested on 20 photon emission images (real and simulated). The final result is compared to an expert evaluation, and the detection quality is quantified.
ISSN:1863-1703
1863-1711
DOI:10.1007/s11760-017-1219-z