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Contribution of optical emission spectroscopy measurements to the understanding of TiO 2 growth by chemical vapor deposition using an atmospheric-pressure plasma torch

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Published in:Journal of applied physics 2017-03, Vol.121 (12)
Main Authors: Chazelas, Christophe, Dublanche-Tixier, C., Tristant, P., Gazal, Yoan
Format: Article
Language:English
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container_issue 12
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container_title Journal of applied physics
container_volume 121
creator Chazelas, Christophe
Dublanche-Tixier, C.
Tristant, P.
Gazal, Yoan
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doi_str_mv 10.1063/1.4979024
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identifier ISSN: 0021-8979
ispartof Journal of applied physics, 2017-03, Vol.121 (12)
issn 0021-8979
1089-7550
language eng
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source American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list)
subjects Chemical Sciences
Engineering Sciences
Material chemistry
Materials
title Contribution of optical emission spectroscopy measurements to the understanding of TiO 2 growth by chemical vapor deposition using an atmospheric-pressure plasma torch
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