Comparing Silicon and Diamond Micro-cantilevers Based Sensors for Detection of Added Mass and Stiffness Changes

In this work, silicon and diamond cantilevers based sensors have been designed and fabricated on five different geometries. Parylene homogeneous nanolayers have been deposited over the sensors in order to evaluate the performance of each design. Silicon and diamond have been compared as building mat...

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Bibliographic Details
Published in:Procedia engineering 2015, Vol.120, p.1115-1119
Main Authors: Possas, M., Rousseau, L., Ghassemi, F., Lissorgues, G., Gonzales, P., Scorsone, E., Bergonzo, P.
Format: Article
Language:English
Subjects:
Bioengineering
Biomaterials
cantilevers
Condensed Matter
diamond sensors
Electromagnetism
Engineering Sciences
Instrumentation and Detectors
Life Sciences
mass detection
Materials Science
Micro and nanotechnologies
Microelectronics
Physics
Polycristalline diamond
silicon
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Summary:In this work, silicon and diamond cantilevers based sensors have been designed and fabricated on five different geometries. Parylene homogeneous nanolayers have been deposited over the sensors in order to evaluate the performance of each design. Silicon and diamond have been compared as building materials for resonant sensors and the corresponding shifts on resonance frequency and quality factor have been recorded. A model is further introduced to disentangle the effect of added mass and rigidity changes. We demonstrate the sensitivity of our sensor to mass effect for low mass deposition and the diamond cantilevers exhibit a three times higher sensitivity as compared to silicon cantilevers for the same geometry.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2015.08.807