Topographic modifications on the graphite surface induced by high energy single-ion impact

Argon ions of 50 keV energy were implanted into graphite at doses ranging from 10 11 to 10 15 ions cm −2. The implanted graphite surface was studied using scanning tunneling microscopy. Isolated single ion-impacts were imaged, showing the formation of a small bump at the point of impact. This charac...

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Bibliographic Details
Published in:Vacuum 1990, Vol.41 (7), p.1686-1689
Main Authors: de Villeneuve, C.H., Phaner, M., Porte, L., Monocoffre, N., Pertosa, P., Tousset, J.
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Engineering Sciences
Exact sciences and technology
Micro and nanotechnologies
Microelectronics
Physical radiation effects, radiation damage
Physics
Structure of solids and liquids
crystallography
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Summary:Argon ions of 50 keV energy were implanted into graphite at doses ranging from 10 11 to 10 15 ions cm −2. The implanted graphite surface was studied using scanning tunneling microscopy. Isolated single ion-impacts were imaged, showing the formation of a small bump at the point of impact. This characteristic bump is attributed to residual damage and defect-induced stresses which take place after the ion collision cascade, around the ion track. Images obtained for increasing ion doses suggest that the collision cascade initiated by the high energy primary ion determines the first stages of evolution of the surface morphology.
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(90)94055-U