Preparation and characterization of SnO2 and Cu-doped SnO2 thin films using electrostatic spray deposition (ESD)

• Published in: Journal of the European Ceramic Society 2007, Vol.27 (1), p.207-213
• Main Authors: MATEI GHIMBEU, C, VAN LANDSCHOOT, R. C, SCHOONMAN, J, LUMBRERAS, M
• Format: Article
• Language: English
• Subjects: Chemical Sciences; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Material chemistry; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Spray coating techniques; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology
• ISSN: 0955-2219; 1873-619X
• DOI: 10.1016/j.jeurceramsoc.2006.05.092

Tin (IV) oxide thin films were deposited on platinum-coated alumina substrates by electrostatic spray deposition (ESD) using tin chloride pentahydrate (SnCl4.5H2O) in ethanol as a precursor solution. The influence of the deposition parameters (temperature, time and flow rate) and copper addition on the morphology and microstructure of the films was studied by SEM, TEM, XRD and Raman spectroscopy, respectively. The tetragonal rutile phase was shown by XRD, with no other phases observed. The sizes of the particles calculated from the XRD peaks were in the nanometre range (7-10 nm) which agreed well with the TEM results. The Raman spectra showed that the SnO2 films were crystallised in the rutile tetragonal phase and a peak shift and a decrease of the peak intensity was observed for the films doped with CuO. 39 refs.