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Deviations from the Paschen's law at short gap distances from 100 nm to 10 μ m in air and nitrogen
Deviations from the Paschen's law in air and nitrogen are investigated for gaps from 100 nm to 10 μm, by using a high precision electrode positioning system. The deviation is observed when electrode gaps are smaller than 4 μm at atmospheric pressure. At distances lower than 1 μm, a nearly const...
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Published in: | Applied physics letters 2014-09, Vol.105 (12) |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Deviations from the Paschen's law in air and nitrogen are investigated for gaps from 100 nm to 10 μm, by using a high precision electrode positioning system. The deviation is observed when electrode gaps are smaller than 4 μm at atmospheric pressure. At distances lower than 1 μm, a nearly constant average breakdown field of 350 V/μm is evidenced in both gases with Au and Ru electrodes. A metallic plasma initiated by field emission from the cathode can explain the reduction of the breakdown voltage at such low gaps. In ambient air, the existence of a pre-breakdown current is also evidenced, probably due to the presence of water adsorbed on electrodes. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4895630 |